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Carbon Tetrafluoride

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Wuxi Tianzhi Chemical Technology Co., Ltd
[China]

Address
No.19, East Gaolang Rd Wuxi Jiangsu
Phone
86-0510-82446262
Contact name
Tianzhi Chemical

Quick Information

  • Place of Origin: China
  • CAS No. : 75-73-0
  • Purity : 99.999%

Description

Product name: Carbon tetrafluoride
Other name: Tetrafluoromethane, Freon 14
CAS: 75-73-0
Molecular formula: CF4
 
Physical Appearance

Melting point -183.6 ℃
Boiling point -128.1 ℃
Liquid density (-130 ℃)1.613g/cm3
Critical temperature -45.67 ℃
Critical pressure 3.73MPa
Critical density 7.1dm3/mol
 
At room temperature, carbon tetrafluoride is a colorless, odorless compressed gas. It has high stability, and is inflammable. At 900℃, it has no reaction with coppernickel, tungsten, or molybdenum. It does not react with water.
 
Use
CF4 can be widely used in etching of silicon, SiO2, SiN4, phosphorus silicon glass and tungsten film material, and also can be used in the electronic components surface cleaning and solar battery production, laser technology, space technology, metal smelting, meteorological insulation, low temperature refrigeration etc many aspects.
 
CF4 Quality standard
Item Index
CF4, % (V/V) ≥ 99.999 99.995 99.99
N2, 10-6(V/V) ≤ 4 20 40
O2, 10-6(V/V) ≤ 1 5 10
CO2, 10-6 (V/V) ≤ 1 5 10
CO, 10-6 (V/V) ≤ 0.3 0.5 1
SF6, 10-6 (V/V) ≤ 1 1 5
H2O,  10-6 (V/V) ≤ 1 5 10
HF, 10-6 (V/V) ≤ 0.1 0.3 0.3
TFC(CH2F2, CHF3, C2F3, C3F8), 10-6 (V/V) ≤ 1 10 30
Total impurities content ppm (V/V) ≤ 10 50 100
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Packing: seamless steel gas cylinders.
Cylinder standard DOT/48.8L DOT/47L 40L 10L 4L
Valve model CGA580(positive screw)CGA590(reverse screw)CGA320 DISS716


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